Precise positioning stage of THK PRECISION

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  • "Ultra-precision positioning devices and High-sensitivity force sensors that support nanoscale technologies from R&D to equipment integration Ultra-precision positioning devices and High-sensitivity force sensors that support nanoscale technologies from R&D to equipment integration

    Nanometer PositioningUltra-precision positioning devices and High-sensitivity force sensors that support nanoscale technologies from RD to equipment integration FORCE SENSING

    "Ultra-precision positioning devices" and "High-sensitivity force sensors" that support nanoscale technologies from R&D to equipment integration



  • Specialized manufacturer of nano-order precision positioning stages and equipment using piezoelectric actuators and piezoelectric elements Specialized manufacturer of nano-order precision positioning stages and equipment using piezoelectric actuators and piezoelectric elements

    Ultraprecise Positioning Stage

    Ultra-precision positioning piezo stage supporting
    advanced technology with "ultra-high resolution of 1 nm" and "high-speed response of milliseconds"

    Applications

    Semiconductor and FPD related equipment / AFM / HDD inspection / Minute
    analytical instruments / Optical communication and measurement

  • Faster and more precise lens focusing by incorporating into microscopes, inspection / measuring devices, and observation equipment Faster and more precise lens focusing by incorporating into microscopes, inspection / measuring devices, and observation equipment

    Focusing Positioner

    Faster and more precise lens focusing by incorporating into microscopes,
    inspection / measuring devices, and observation equipment

    Applications

    Interference applied measurement / Image processing / Semiconductor and FPD inspection
    / Laser machining / Cell observation

  • Piezo-driven mirror tilting with optimal sub-μrad resolution for laser scanning and precision alignment of optical axes Piezo-driven mirror tilting with optimal sub-μrad resolution for laser scanning and precision alignment of optical axes

    For Optical Mirror Alignment

    Piezo-driven mirror tilting with optimal
    sub-μrad resolution for laser scanning and precision alignment of optical axes

    Applications

    Laser beam scanning / cavity adjustment / optical bio /
    laser processing

  • Nano / micro machining stages with a robust structure for stable and precise position control of cutting tools and heavy workpieces Nano / micro machining stages with a robust structure for stable and precise position control of cutting tools and heavy workpieces

    For High-precision Processing
    Machining

    Nano / micro machining stages with a robust structure for stable and precise position control
    of cutting tools and heavy workpieces

    Applications

    Diamong Turning Tool Micro Feeding / Precision Die Machining
    / High Speed Tool Control (FTS) / Micro Cutting & Grinding Processing

  • Highly sensitive force sensor that detects and measures forces as small as milligrams (mg) Highly sensitive force sensor that detects and measures forces as small as milligrams (mg)

    Micro-Force Sensor

    Highly sensitive
    force sensor that detects and measures forces as small as milligrams (mg)

    Applications

    Puncture force measurement / Tensile and compression test / Friction force /
    Viscoelasticity test / Contact detection

  • Highly sensitive force sensor that detects and measures forces as small as milligrams (mg) Highly sensitive force sensor that detects and measures forces as small as milligrams (mg)

    Linear Motor Stage

    Precision Lon
    g stroke stages with coreless linear motors featuring low low speed ripple, excellent speed stability and high positioning
    accuracy.

    Applications

    Liquid crystal and semiconductor related equipment / FA and automation equipment / Assembly and
    conveyance machines / Testing and measuring equipment

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