Precise positioning stage of THK PRECISION

Piezo stage

It can control the position with ultra-high resolution of up to 1 nm and fast response speed, and is optimal for precision positioning in a small range. A wide range of variations are available.

Piezo motor stage

This is a long-stroke high-precision stage that enables nano-level positioning over the entire range of motion of several tens of millimeters and high position reproducibility with a built-in scale.

Linear motor stage

Coreless linear motor control enables smooth and stable traveling and positioning from low to high speeds even with high loading loads.

Force sensor

Force sensors are available in two types: a "micro force type" that responds to small forces at the mg level and a "high rigidity type" that can stably measure loads of 100 N or more.