Precise positioning stage of THK PRECISION

How to install a stage in a vacuum

• Target Products

  piezo stage

• Issues

  We would like to improve the piezo stage listed in the catalog for atmospheric specifications so that it can be used in a vacuum.

• Response and Suggestions

  All piezo stages in the catalog are intended for atmospheric use. If a vacuum specification is desired, the following modifications can be made.

  • Cable wires and adhesives in vacuum shall be vacuum compatible type.
  • Determine the cable length in vacuum and the cable length on the atmospheric side, respectively. (Atmospheric specifications are normally 2 min length.)
  • BNC connectors shall be used for connection to the vacuum bulkhead.

  To be handled by customer

  Please prepare the introduction terminal of the vacuum bulkhead as "isolated BNC (female)". (2 BNCs are required for 1-axis stages, one for the piezo cable and one for the sensor cable.)