Precise positioning stage of THK PRECISION

  • HOME HOME
  • Technical Issues
  • Can a piezo stage with nanometer precision position even heavy objects with high precision?

Can a piezo stage with nanometer precision position even heavy objects with high precision?

  • Target Products

    piezo stage

  • Issues

    We want to control the position of heavy objects with high resolution.

  • Response and Suggestions

    The "Resonance Frequency" item in the specification table can be used as a reference for the positioning stability of the piezo stage.
    The value of this resonant frequency is determined primarily by the mechanism of the stage.


    Suppose the piezo stage of an elastic hinge mechanism is an equivalent model of a spring mass, and the resonance frequency is expressed by the single vibration equation.

    Can a piezo stage with nanometer precision position even heavy objects with high precision?

    From here, the higher the ratio of rigidity K to mass (M + m), the higher the f.
    In addition, the shape of the load and the installation conditions (center load or offset load, etc.) are also affected.
    Preference

    • Maximum stroke
    • Body size
    • Load capacity and shape

    If you provide us with the information above, we will propose a piezo stage optimally designed by FEM analysis.

Contact Form

フォームが表示されるまでしばらくお待ち下さい。

恐れ入りますが、しばらくお待ちいただいてもフォームが表示されない場合は、こちらまでお問い合わせください。