Is the only difference between a "piezo stage" and a "piezo motor stage" the amount of movement?
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Target Products
Piezo Stage, Piezo Motor Stage
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Issues
I would like to know the difference in features between "piezo stage" and "piezo motor stage," which are precision positioning stages with nanometer accuracy, and to make a selection decision.
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Response and Suggestions
Piezo stage" and "piezo motor stage" both use a piezo element (piezoelectric element) as a drive source, but the difference is not only in the amount of movement, as the principle of operation is different.
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piezo stage
[Drive Principle] Table is moved through expansion/contraction of piezoelectric element. [Main Features] - Limited stroke
- Ultra-high resolution
- Fast response
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Piezo Motor Stage
[Drive Principle] Table is fed gradually through repeated extension and bending of four legs. [Main Features] - Long strokes possible
- High resolution
- Maintains the stop position even when the power is turned off
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Feature Comparison
piezo stage | Piezo Motor Stage | |
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Available range | < 1mm | 8mm, 16mm, 25mm (or more is possible) |
Resolution (in closed loop) | 1nm ~ | 20nm , 40nm |
Repeatability (in closed loop) | ±1nm ~ | ±20nm , ±40nm |
Fixed-point (static) positioning | ○ | ○ |
Constant (uniform) speed movement | ○ | - |
Periodic continuous drive (sinusoidal wave, triangle wave, etc.) | ○ | - |
Movement guide | Elastic hinge guide | Cross Roller Guide |
Built-in displacement sensor | Electrostatic capacity type sensors, strain gauge sensors | Optical Linear Scale |
Vacuum-compatible | ○ | ○ |
Non-magnetic-compatible | ○ | ○ |
Position retention at power OFF | - | ○ |
Generative force, thrust | (Generative force) Tens to hundreds of N | (Thrust) 6N , 20N |
Piezo Motor Stage | Analog voltage (0 to +10 V), serial(RS232C), parallel (16bit), LAN, USB, pulse input |
LAN, serial(RS485), serial(RS232C) |
*The following comparison focuses mainly on differences in drive principles, to serve as reference in selecting a stage.
*In the following table, "○" indicates that the stage is compatible with or could support the applicable feature, while "-" indicates that the stage does not support or is not suitable for the applicable feature.
*Whether a stage is actually compatible varies depending on conditions such as required performance specifications and the usage method.
*See the specifications table for the individual product for details on the specifications for each stage.
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