Precise positioning stage of THK PRECISION

  • HOME HOME
  • Technical Issues
  • Is the only difference between a "piezo stage" and a "piezo motor stage" the amount of movement?

Is the only difference between a "piezo stage" and a "piezo motor stage" the amount of movement?

  • Target Products

    Piezo Stage, Piezo Motor Stage

  • Issues

    I would like to know the difference in features between "piezo stage" and "piezo motor stage," which are precision positioning stages with nanometer accuracy, and to make a selection decision.

  • Response and Suggestions

    Piezo stage" and "piezo motor stage" both use a piezo element (piezoelectric element) as a drive source, but the difference is not only in the amount of movement, as the principle of operation is different.

    • piezo stage
      piezo stage
      [Drive Principle] Table is moved through expansion/contraction of piezoelectric element.
      [Main Features]
      • Limited stroke
      • Ultra-high resolution
      • Fast response
    • Piezo Motor Stage
      Piezo Motor Stage
      [Drive Principle] Table is fed gradually through repeated extension and bending of four legs.
      [Main Features]
      • Long strokes possible
      • High resolution
      • Maintains the stop position even when the power is turned off

Feature Comparison

piezo stage Piezo Motor Stage
Available range < 1mm 8mm, 16mm, 25mm (or more is possible)
Resolution (in closed loop) 1nm ~ 20nm , 40nm
Repeatability (in closed loop) ±1nm ~ ±20nm , ±40nm
Fixed-point (static) positioning
Constant (uniform) speed movement
Periodic continuous drive (sinusoidal wave, triangle wave, etc.)
Movement guide Elastic hinge guide Cross Roller Guide
Built-in displacement sensor Electrostatic capacity type sensors, strain gauge sensors Optical Linear Scale
Vacuum-compatible
Non-magnetic-compatible
Position retention at power OFF
Generative force, thrust (Generative force) Tens to hundreds of N (Thrust) 6N , 20N
Piezo Motor Stage Analog voltage (0 to +10 V), serial(RS232C),
parallel (16bit), LAN, USB, pulse input
LAN, serial(RS485), serial(RS232C)

*The following comparison focuses mainly on differences in drive principles, to serve as reference in selecting a stage.
*In the following table, "○" indicates that the stage is compatible with or could support the applicable feature, while "-" indicates that the stage does not support or is not suitable for the applicable feature.
*Whether a stage is actually compatible varies depending on conditions such as required performance specifications and the usage method.
*See the specifications table for the individual product for details on the specifications for each stage.

Technical Issues List

Contact Form

フォームが表示されるまでしばらくお待ち下さい。

恐れ入りますが、しばらくお待ちいただいてもフォームが表示されない場合は、こちらまでお問い合わせください。