I want to perform positioning with load control.
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Target Products
Piezo stage, force sensor
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Issues
I want to perform positioning while controlling to maintain a constant load, rather than positioning by displacement.
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Response and Suggestions
Normally, piezo stages operate in position control because the control is performed so that the built-in displacement sensor matches the command signal from the host.
For load control, a load sensor that can measure the magnitude of external force can be combined with a piezo stage, and software* on a PC can control the position of the piezo stage so that the difference between the specified load and the current value becomes smaller.
"Force sensor" series are available for force measurement, but custom design is recommended considering the required measurement range and resolution (sensitivity) as well as coupling with a piezo stage.*Software for load control is available on a custom basis.
Load control example (1)
This is an example where a sharp-pointed probe is slowly lowered at a speed of 2μm/sec and stopped when a pressing force of approximately 20 to 30 μN is detected.
(1) Ascent and Descent piezo stage is descending at low speed. Sharp probe tip is not in contact with the sample.
(2) The sharp probe begins to contact the sample, the micro force sensor detects it, and the output voltage changes.
(3) The piezo stage is stopped when a contact load of approximately 30 μN is detected.
(4) The piezo stage is raised and the sharp probe tip is again uncontacted.
Load control example (2)
This is an example of combining a piezo stage with a high rigidity type of force sensor.
Tools can be mounted to monitor cutting force while making fine cuts into the workpiece.
| Piezo Stage Section Overview Specifications | |
|---|---|
| Stroke | 10 μm |
| Resolution | (Open-loop) |
| Load Sensor Section Overview Specifications | |
|---|---|
| Measurement range | 0 to 50N |
| Resolution | 50 mN |
Contact Form
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