Goniometry stage｜THK PRECISION CO.,LTD.

Goniometry stage

A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.

Features

Space-saving with a slim body
Generates less heat itself
A type with a vacuum environment, a non magnetic type
High positional repeatability with a built-in liner encoder

Application

High-accuracy positioning of an optical system
Laser alignment
Precision mapping measurement
X-ray/analysis and measuring equipment
Specimen stage for microscopes
Application in which the object is to be held static after position adjustment

The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.

LS1GU（D）90 Goniometry stage

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Model Number		LS1GU90-02A-20	LS1GU90-02B-20	LS1GD90-02A-20	LS1GD90-02B-20
Appearance
Moving range		±1°(Total range 2°)		±1°(Total range 2°)
Resolution		0.1"［second］	0.2"［second］	0.1"［second］	0.2"［second］
Repeatability		±0.1"［second］	±0.2"［second］	±0.1"［second］	±0.2"［second］
Maximum travel speed		3.6°/sec		2.4°/sec
Load capacity		2 kg		2 kg
Stall force		20 N		20 N
Built-in optical linear scale Type タイプ		Manufactured by RENISHAW	Manufactured by THK PRECISION	Manufactured by RENISHAW	Manufactured by THK PRECISION
Body	Weight	650g		650g
Body	Material	Aluminum		Aluminum