XYZAxis High durability model
Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.
Classification of performances with two mechanisms
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
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Direct-drive mechanism
- A mechanism in which a piezo-electric elements directly moves the table.
- It excels in resolution and response thanks to a short stroke.
- With high rigidity, it is capable of performing stable positioning even under a large load.
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Displacement magnification mechanism
- The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
- A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
- Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
Applications
- Semiconductor and FPD inspection
- HDD Tester
- Laser optic alignment
- Interferometer devices
- Analytical Instruments
- Nanometer positioning
Without opening
| Model Number | PSM3L160-100U |
|---|---|
| Appearance |  |
| Travel range ( Closed loop ) | 100μm |
| Resolution | 2nm |
| Repeatability | ±2nm |
| Load capacity | 10N |
| Resonant frequency ( 0g Load ) | 220Hz |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum alloy ,Stainless steel |
With opening
| Model Number | PKM3L160-100U |
|---|---|
| Appearance |  |
| Travel range ( Closed loop ) | 100μm |
| Resolution | 2nm |
| Repeatability | ±2nm |
| Load capacity | 10N |
| Resonant frequency ( 0g Load ) | 250Hz |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum alloy ,Stainless steel |
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