XYZAxis A general-purpose model with a strain gauge
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
Travel range：（XY）200μm＋（Z）200μm
| Model Number | (XY) PS2L80-200U-S | (Z) PSVL60-200U-S |
|---|---|---|
| Appearance |  |
|
| Travel range ( Closed loop ) | （X,Y）200μm | 200μm |
| Resolution | （X,Y）20nm | 20nm |
| Repeatability | （X,Y）±20nm | ±20nm |
| Load capacity | 5N | 5N |
| Resonant frequency ( 0g Load ) | 170Hz | 390Hz |
| Built-in displacement sensor | Strain gauge sensor | Strain gauge sensor |
| Body Material | Aluminum＋Steel | Aluminum＋Steel |
Travel range：（XY）400μm＋（Z）400μm
| Model Number | PS2L90-400U-S | PSVL60-400U-S |
|---|---|---|
| Appearance |  |
|
| Travel range ( Closed loop ) | （X,Y）400μm | 400μm |
| Resolution | （X,Y）50nm | 50nm |
| Repeatability | （X,Y）±50nm | ±50nm |
| Load capacity | 5N | 5N |
| Resonant frequency ( 0g Load ) | 155Hz | 270Hz |
| Built-in displacement sensor | Strain gauge sensor | Strain gauge sensor |
| Body Material | Aluminum＋Steel | Aluminum＋Steel |
Travel range：（XY）200μm＋（Z）200μm
Travel range：（XY）400μm＋（Z）400μm
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