X-axis stage｜THK PRECISION CO.,LTD.

X-axis stage

A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.

Features
- Space-saving with a slim body
- Generates less heat itself
- A type with a vacuum environment, a non magnetic type
- High positional repeatability with a built-in liner encoder

Application

High-accuracy positioning of an optical system
Laser alignment
Precision mapping measurement
X-ray/analysis and measuring equipment
Specimen stage for microscopes
Application in which the object is to be held static after position adjustment

The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.

LS1L46 / LS1L60 X-axis stage

SCROLL

Model Number	LS1L60-08B-06	LS1L60F-08B-06
Appearance
Moving range	±4 mm（Total range 8 mm）
Resolution	40 nm
Positioning repeatability	±40 nm
Maximum travel speed	5 mm/sec
Load capacity	1 kg
Stall force	6 N
Built-in optical linear scale	Manufactured by THK PRECISION
Body Weight	250 g	550 g
Body Material	Aluminum	Stainless steel

LS1L90 X-axis stage

SCROLL

Model Number	LS1L90-16A-06	LS1L90-16A-20	LS1L90F-16A-06	LS1L90F-16A-20	LS1L90-16B-06	LS1L90-16B-20	LS1L90F-16B-06	LS1L90F-16B-20
Appearance
Moving range	±8mm（Total range 16 mm）
Resolution	20 nm				40 nm
Positioning repeatability	±20 nm				±40 nm
Maximum travel speed	5 mm/sec
Load capacity	2 kg
Stall force	6 N	20 N	6 N	20 N	6 N	20 N	6 N	20 N
Built-in optical linear scale	Manufactured by RENISHAW				Manufactured by THK PRECISION
Body Weight	650 g		1350 g		650 g		1350 g
Body Material	Aluminum		Stainless steel		Aluminum		Stainless steel

LS1L120 X-axis stage

SCROLL

Model Number	LS1L120-25A-06	LS1L120-25A-20	LS1L120F-25A-06	LS1L120F-25A-20	LS1L120-25B-06	LS1L120-25B-20	LS1L120F-25B-06	LS1L120F-25B-20
Appearance
Moving range	±12.5mm（ Total range 25 mm）
Resolution	20 nm				40 nm
Positioning repeatability	±20 nm				±40 nm
Maximum travel speed	5 mm/sec
Load capacity	3 kg
Stall force	6 N	20 N	6 N	20 N	6 N	20 N	6 N	20 N
Built-in optical linear scale	Manufactured by RENISHAW				Manufactured by THK PRECISION
Body Weight	1.0 kg		2.2 kg		1.0 kg		2.2 kg
Body Material	Aluminum		Stainless steel		Aluminum		Stainless steel