For optical mirror alignment
This stage is designed for fine adjustment of the angle of optical mirrors. It excels in high-speed oscillation and high positioning reproducibility, and is optimal for applications such as laser beam scanning and precision mirror alignment.
A stage for a large-diameter mirror is also available on a custom order basis
Since the piezo element as the drive source has a large generative force (at hundreds of N), the stage is capable of stably performing positioning with high accuracy even for a heavy, large-diameter mirror.
Angle control is also easy
Even a static motion for moving the mirror by specifying the angle in a value, and an oscillating motion for reciprocally oscillating the mirror on a continuous basis, can be easily performed through a controller/driver.
Applications
- Optical axis adjustment
- Cavity adjustment
- Scanning laser beam
- Laser processing
- Tilt adjustment
- Biophotonic
Single-axis tilting(θx)
| Model Number | PT1M36-500S | PT1T60-500S | |
|---|---|---|---|
| Appearance |  |
 |
|
| Deflection angle | Closed loop | 500"［second］≒0.14° ≒2.4mrad |
500"［second］≒0.14° ≒2.4mrad |
| Open loop | 630"［second］≒0.175° ≒3.1mrad |
550"［second］≒0.15° ≒2.6mrad |
|
| Resolution | 0.05"［second］≒0.24μrad | 0.02"［second］≒0.10μrad | |
| Repeatability | ±0.05"［second］≒±0.24μrad | ±0.02"［second］≒±0.10μrad | |
| Load capacity | 0.3N | 10N | |
| Resonant frequency ( 0g Load ) | 8000Hz | 1800Hz | |
| Built-in displacement sensor | Capacitive displacement sensor | ||
| Body Material | Aluminum | ||
Double-axes tilting(θxθy)
| Model Number | PT2M60-240S | PT2M120-500S | PT2M40-800S | |
|---|---|---|---|---|
| Appearance |  |
 |
 > |
|
| Deflection angle | Closed loop | （θx,θy）240"［second］≒0.07° ≒1.2mrad |
（θx,θy）500"［second］≒0.14° ≒2.4mrad |
（θx,θy）800"［second］≒0.22° ≒3.9mrad |
| Open loop | （θx,θy）290"［second］≒0.08° ≒1.4mrad |
（θx,θy）580"［second］≒0.16° ≒2.8mrad |
（θx,θy）900"［second］≒0.25° ≒4.4mrad |
|
| Resolution | （θx,θy）0.05"［second］≒0.24μrad | |||
| Repeatability | （θx,θy）±0.05"［second］≒±0.24μrad | |||
| Load capacity | 0.5N | 5N | 1N | |
| Resonant frequency ( 0g Load ) | 760Hz | 180Hz | 330Hz | |
| Built-in displacement sensor | Capacitive displacement sensor | |||
| Body Material | Aluminum | Aluminum | Aluminum + Steel | |
For 1 axis tilting（θx）
For 2 axes tilting(θx,θy)
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