Box type｜THK PRECISION CO.,LTD.

Box type

These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.

Objective lenses of various manufacturers can be fitted.

Four thread sizes are selectable from in order to accommodate different manufacturers'lens thread diameters.
An optional thread diameter conversion adapter is also available.
Fitting of a non-standard lens is also negotiable.

Four types are selectable

【Horizontal type】
- This type has a structure with a thin body.
- Since it offers various strokes, it is recommended to select this type if a stage for a long travel distance is required.
【Vertical type】
- This type has high rigidity and is focused on response.
- It is suitable for cases where a heavy lens or a lens with a long tube is used, or cases where a high-speed focusing is desired.
【Box type】
- This type has a double-supported structure that is symmetrical around the objective lens, and is capable of providing stable focusing even with a heavy lens.
- This product can be securely installed and fixed with four screws, and 1s suitable for incorporation in a manufacturing system or an inspection device.
【For microscope tube】
- With a microscope tube attached, it can be finely adjusted toward the focusing direction.

Applications

High-speed focusing
Image processors
Confocal microscopes
Laser processing
Semiconductor and FPD inspection devices
Interferometer shape measurement

PFB Box type

SCROLL

Model Number	PFB＊-030U	PFB＊-100U	PFB＊-300U
Appearance
Travel range ( Closed loop )	30μm	100μm	300μm
Resolution	1nm	2nm	10nm
Repeatability	±1nm	±2nm	±10nm
Resonant frequency ( 0g Load )	3100Hz	490Hz	210Hz
Built-in displacement sensor	Capacitive displacement sensor
Body Material	Aluminum