XAxis A general-purpose model with a strain gauge
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
PS1L＊＊-S
| Model Number | PS1L60-200U-S | PS1L60-400U-S |
|---|---|---|
| Appearance |  |
|
| Travel range (Closed loop) | 200μm | 400μm |
| Resolution | 20nm | 50nm |
| Repeatability | ±20nm | ±50nm |
| Load capacity | 5N | 5N |
| Resonant frequency（0g Load） | 470Hz | 290Hz |
| Built-in displacement sensor | Strain gauge sensor | |
| Body Material | Aluminum + Steel | |
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