Precise positioning stage of THK PRECISION

Rotary stage

Rotary stage

A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.

Features

  • Space-saving with a slim body
  • Generates less heat itself
  • A type with a vacuum environment, a non magnetic type
  • High positional repeatability with a built-in liner encoder

Application

  • High-accuracy positioning of an optical system
  • Laser alignment
  • Precision mapping measurement
  • X-ray/analysis and measuring equipment
  • Specimen stage for microscopes
  • Application in which the object is to be held static after position adjustment

The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.

SCROLL
SCROLL
Model Number LS1C90-02A-20 LS1C90-02B-20
Appearance
回転ステージ
Moving range
±1°( Total range 2°)
Resolution
0.2"[second]
0.4"[second]
Repeatability
±0.2"[second]
±0.4"[second]
Maximum travel speed
12°/sec
Load capacity
2 kg
Stall force
20 N
Built-in optical linear scale Type Manufactured by RENISHAW Manufactured by THK PRECISION
Body Weight 700g
Material Aluminum

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