Precise positioning stage of THK PRECISION

Tilting (+ rise/fall) type

Tilting (+ rise/fall) type

The rotation and angle can be adjusted with a piezo drive. Each stage excels in high-speed oscillation and angular resolution despite a slight angular displacement, and is suitable for applications such as minute-angle alignment for an optical device and precision face matching.

A rotary guide with an elastic hinge mechanism

An originally designed elastic hinge mechanism magnifies slight expansion and contraction in displacement of the piezo element, and supports stable rotary motion. With no friction or abrasion, the product excels in smooth and high-speed motion, and is suitable for the adjustment of minute angles.

Applications

  • Laser optical axis adjustment
  • Precision parallel mating
  • Small angle adjustment
  • Tilt adjustment
  • Cavity length adjustment

PT1T / PT3V Tilting(+ rise/fall) type

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Model Number PT3V80F-400S PT3V100-800S
Appearance Tilting (+ rise/fall) type Tilting (+ rise/fall) type
Tilting angle, Travel range Tilting(θx,θy) ±400"[second]≒±0.11°
≒±1.9mrad
±800"[second]≒±0.22°
≒±3.9mrad
Lifting(Z) 100μm 300μm
Resolution Tilting(θx,θy) 0.02"[second]≒0.10μrad 0.04"[second]≒0.19μrad
Lifting(Z) 2nm 10nm
Repeatability Tilting(θx,θy) ±0.02"[second]≒±0.10μrad ±0.04"[second]≒±0.19μrad
Lifting(Z) ±2nm ±10nm
Load capacity 10N
Resonant frequency
(0g Load)
270Hz 230Hz
Built-in displacement sensor Capacitive displacement sensor
Body Material Steel Aluminum + Steel

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