Tilting (+ rise/fall) type
The rotation and angle can be adjusted with a piezo drive. Each stage excels in high-speed oscillation and angular resolution despite a slight angular displacement, and is suitable for applications such as minute-angle alignment for an optical device and precision face matching.
A rotary guide with an elastic hinge mechanism
An originally designed elastic hinge mechanism magnifies slight expansion and contraction in displacement of the piezo element, and supports stable rotary motion. With no friction or abrasion, the product excels in smooth and high-speed motion, and is suitable for the adjustment of minute angles.
Applications
- Laser optical axis adjustment
- Precision parallel mating
- Small angle adjustment
- Tilt adjustment
- Cavity length adjustment
PT1T / PT3V Tilting(+ rise/fall) type
SCROLL
Model Number | PT3V80F-400S | PT3V100-800S | |
---|---|---|---|
Appearance | |||
Tilting angle, Travel range | Tilting(θx,θy) | ±400"[second]≒±0.11° ≒±1.9mrad |
±800"[second]≒±0.22° ≒±3.9mrad |
Lifting(Z) | 100μm | 300μm | |
Resolution | Tilting(θx,θy) | 0.02"[second]≒0.10μrad | 0.04"[second]≒0.19μrad |
Lifting(Z) | 2nm | 10nm | |
Repeatability | Tilting(θx,θy) | ±0.02"[second]≒±0.10μrad | ±0.04"[second]≒±0.19μrad |
Lifting(Z) | ±2nm | ±10nm | |
Load capacity | 10N | ||
Resonant frequency (0g Load) |
270Hz | 230Hz | |
Built-in displacement sensor | Capacitive displacement sensor | ||
Body Material | Steel | Aluminum + Steel |
Product Inquiries
フォームが表示されるまでしばらくお待ち下さい。
恐れ入りますが、しばらくお待ちいただいてもフォームが表示されない場合は、こちらまでお問い合わせください。