Z-axis stage
A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.
Features
- Space-saving with a slim body
- Generates less heat itself
- A type with a vacuum environment, a non magnetic type
- High positional repeatability with a built-in liner encoder
Application
- High-accuracy positioning of an optical system
- Laser alignment
- Precision mapping measurement
- X-ray/analysis and measuring equipment
- Specimen stage for microscopes
- Application in which the object is to be held static after position adjustment
The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.
LSVL90（F）-12 Z-axis stage
Model Number |
LSVL90-12A-20 | LSVL90F-12A-20 | LSVL90-12B-20 | LSVL90F-12B-20 | |
|---|---|---|---|---|---|
Appearance |
-12_spc_01.gif)
|
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Moving range |
±6㎜( Total range12㎜) |
±6㎜( Total range12㎜) |
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Resolution |
20nm |
40nm |
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Positioning repeatability |
±20nm |
±40nm |
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Maximum travel speed |
5 mm/sec |
5 mm/sec |
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Load capacity |
0.5 kg |
0.5 kg |
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Stall force |
20 N |
20 N |
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Built-in optical linear scale Type |
Type A（Manufactured by RENISHAW） | Type B（Manufactured by THK PRECISION） | |||
Body |
Weight |
900g |
2200g |
900g |
2200g |
Material |
Aluminum |
Stainless steel |
Aluminum |
Stainless steel |
|
Horizontal type LSVL90（F）-03
Model Number |
LSVL90-03A-20 | LSVL90F-03A-20 | LSVL90-03B-20 | LSVL90F-03B-20 | |
|---|---|---|---|---|---|
Appearance |
-03_spc_01.gif) |
||||
Moving range |
±1.5㎜( Total range3㎜) |
±1.5㎜( Total range3㎜) |
|||
Resolution |
20nm |
40nm |
|||
Positioning repeatability |
±20nm |
±40nm |
|||
Maximum travel speed |
1 mm/sec |
1 mm/sec |
|||
Load capacity |
5 kg
|
5 kg
|
|||
Stall force |
20 N |
20 N |
|||
Built-in optical linear scale Type |
Type A（Manufactured by RENISHAW） | Type B（Manufactured by THK PRECISION） | |||
Body |
Weight |
1100g |
2600g |
1100g |
2600g |
Material |
Aluminum |
Stainless steel |
Aluminum |
Stainless steel |
|
Vertical type
LSVL90（F）-12
-12_oth_01.gif)
Horizontal type
LSVL90（F）-03
-03_oth_01.gif)
-12A-20_drw_01.gif)
-03A-20_drw_01.gif)
Horizontal type mechanism
With a combined top and bottom structure, the wedge-shaped moving table uses a piezoelectric actuator to move the lower wedge horizontally, which raises and lowers the upper wedge. The horizontal and tilt cross roller guides provide smooth and highly accurate direction changes.
-03_02.jpg)
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