ZAxis With an opening model
Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.
Available from a compact to large openings
The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.
Smooth and accurate scanning
Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.
Applications
- SPM,AFM
- Microscope tables
- Spectroscopic instruments
- Semiconductor & FPD-related inspections
- Photolithography systems, Exposure devices
- Mapping measurements
PKVH / PKVL ZAxis With an opening model
PKVH
| Model Number | PKVH60-012U |
|---|---|
| Appearance |  |
| Travel range ( Closed loop ) | 12μm |
| Resolution | 1nm |
| Repeatability | ±1nm |
| Load capacity | 10N |
| Resonant frequency ( 0g Load ) | 2500Hz |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum |
PKVL
| Model Number | PKVL64F-100U | PKVL100-100U | PKVL84F-300U | PKVL60-100U | PKVL60-200U |
|---|---|---|---|---|---|
| Appearance |  |
 |
 |
 |
|
| Travel range ( Closed loop ) | 100μm | 300μm | 100μm | 200μm | |
| Resolution | 2nm | 10nm | 2nm | 5nm | |
| Repeatability | ±2nm | ±10nm | ±2nm | ±5nm | |
| Load capacity | 10N | 5N | |||
| Resonant frequency ( 0g Load ) | 480Hz | 480Hz | 210Hz | 380Hz | 350Hz |
| Built-in displacement sensor | Capacitive displacement sensor | Capacitive displacement sensor | |||
| Body Material | Aluminum＋Steel | Aluminum | Aluminum＋Steel | Aluminum＋Steel | |
| Model Number | PKMVL160-200U |
|---|---|
| Appearance |  |
| Travel range ( Closed loop ) | 200μm |
| Resolution | 5nm |
| Repeatability | ±5nm |
| Load capacity | 10N |
| Resonant frequency ( 0g Load ) | 150Hz |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum |
Direct-drive mechanism
Displacement magnification mechanism
PKVH Direct-drive mechanism
PKVL Displacement magnification mechanism
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