XYZAxis Standard model
Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.
Classification of performances with two mechanisms
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
-
Direct-drive mechanism
- A mechanism in which a piezo-electric elements directly moves the table.
- It excels in resolution and response thanks to a short stroke.
- With high rigidity, it is capable of performing stable positioning even under a large load.
-
s
Displacement magnification mechanism
- The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
- A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
- Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
Applications
- Semiconductor and FPD inspection
- HDD Tester
- Laser optic alignment
- Interferometer devices
- Analytical Instruments
- Nanometer positioning
PS3H / PS3L Standard linear XYZ-axes stage
PS3H Direct-drive mechanism
| Model Number | PS3H70-020UA | PS3H120-030U |
|---|---|---|
| Appearance |  |
 |
| Travel range ( Closed loop ) | （X,Y）20μm,（Z）12μm | （X,Y,Z）30μm |
| Resolution | （X,Y,Z）1nm | |
| Repeatability | （X,Y,Z）±1nm | |
| Load capacity | 10N | |
| Resonant frequency ( 0g Load ) | 970Hz | 740Hz |
| Built-in displacement sensor | Capacitive displacement sensor | |
| Body Material | Steel | Aluminum |
PS3L Displacement magnification mechanism
| Model Number | PS3L100-080UA | PS3L68-100U |
|---|---|---|
| Appearance |  |
 |
| Travel range ( Closed loop ) | （X,Y）80μm,（Z）20μm | （X,Y,Z）100μm |
| Resolution | （X,Y）2nm,（Z）1nm | （X,Y,Z）2nm |
| Repeatability | （X,Y）±2nm,（Z）±1nm | （X,Y,Z）±2nm |
| Load capacity | 10N | 5N |
| Resonant frequency ( 0g Load ) | 400Hz | 250Hz |
| Built-in displacement sensor | Capacitive displacement sensor | |
| Body Material | Aluminum | |
Direct-drive mechanism
Displacement magnification mechanism
PS3H Direct-drive mechanism
PS3L Displacement magnification mechanism
Product Inquiries
フォームが表示されるまでしばらくお待ち下さい。
恐れ入りますが、しばらくお待ちいただいてもフォームが表示されない場合は、こちらまでお問い合わせください。