Precise positioning stage of THK PRECISION

Single-axis type

Single-axis type

This stage is intended to achieve nano-micro processing in precision cutting. It is capable of performing position control for tool cutting and the work (workpiece to be processed) at high speed and with high accuracy.

A dust-proof and drip-proof measure

  • A sealed structure is adopted as a measure to protect the stage from a machining fluid or mist, and prevent tiny chips from entering the stage.

A robust body

  • The body is made of steel in order to secure stability during machining.
  • The body structure is so robust that the machining accuracy is not impaired by factors such as chatter vibration or cutting load.

Applications

  • Diamond bit feeding
  • Fine cutting and grinding
  • High-speed tool control, FTS
  • Work positioning
  • Precision metal processing
  • Precision positioning of high load object

PU1 Single-axis type

PU1

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Model Number PU1H70F-012U PU1H80F-030U PU1H150F-060U
Appearance Single-axis type Single-axis type Single-axis type
Travel range ( Closed loop ) 12 μm 30 μm 60 μm
Resolution 1 nm 2 nm
Repeatability ±1 nm ±2 nm
Load capacity 50 N
Resonant frequency ( 0g Load ) 4300 Hz 2200 Hz 650 Hz
Built-in displacement sensor Capacitive displacement sensor
Body Material Steel

Model Number PU1L70F-080U
Appearance Single-axis type
Travel range ( Closed loop ) 80 μm
Resolution 2 nm
Repeatability ±2 nm
Load capacity 50 N
Resonant frequency ( 0g Load ) 1000 Hz
Built-in displacement sensor Capacitive displacement sensor
Body Material Steel

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