Horizontal type
These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.
Objective lenses of various manufacturers can be fitted.
- Four thread sizes are selectable from in order to accommodate different manufacturers'lens thread diameters.
- An optional thread diameter conversion adapter is also available.
- Fitting of a non-standard lens is also negotiable.
Four types are selectable
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【Horizontal type】
- This type has a structure with a thin body.
- Since it offers various strokes, it is recommended to select this type if a stage for a long travel distance is required.
-
【Vertical type】
- This type has high rigidity and is focused on response.
- It is suitable for cases where a heavy lens or a lens with a long tube is used, or cases where a high-speed focusing is desired.
-
【Box type】
- This type has a double-supported structure that is symmetrical around the objective lens, and is capable of providing stable focusing even with a heavy lens.
- This product can be securely installed and fixed with four screws, and 1s suitable for incorporation in a manufacturing system or an inspection device.
-
【For microscope tube】
- With a microscope tube attached, it can be finely adjusted toward the focusing direction.
Applications
- High-speed focusing
- Image processors
- Confocal microscopes
- Laser processing
- Semiconductor and FPD inspection devices
- Interferometer shape measurement
PFH Built-in displacement sensor: Capacitance type
| Model Number | PFHC＊＊ -015U |
PFHW＊＊ -015U |
PFHC＊＊ -100U |
PFHW＊＊ -100U |
PFHW＊＊ -200U |
PFHW＊＊ -300U |
PFHW＊＊ -400U |
|---|---|---|---|---|---|---|---|
| Appearance |  |
||||||
| Nominal diameter | Small dia. | Large dia. | Small dia. | Large dia. | Large dia. | Large dia. | Large dia. |
| Travel range ( Closed loop ) | 15μm | 100μm | 200μm | 300μm | 400μm | ||
| Resolution | 1nm | 2nm | 5nm | 10nm | 20nm | ||
| Repeatability | ±1nm | ±2nm | ±5nm | ±10nm | ±20nm | ||
| Resonant frequency ( 0g Load ) | 950Hz | 680Hz | 520Hz | 430Hz | 370Hz | 300Hz | 240Hz |
| Built-in displacement sensor | Capacitive displacement sensor | ||||||
| Body Material | Aluminum + Steel | ||||||
PFH Built-in displacement sensor: Strain gauge type
| Model Number | PFHW＊＊-200U-S | PFHW＊＊-400U-S | PFHC2020-800U-S |
|---|---|---|---|
| Appearance |  |
 |
|
| Nominal diameter | Large dia. | Large dia. | Small dia. |
| Travel range ( Closed loop ) | 200μm | 400μm | 800μm |
| Resolution | 20nm | 50nm | 100nm |
| Repeatability | ±20nm | ±50nm | ±100nm |
| Resonant frequency ( 0g Load ) | 380Hz | 250Hz | 120Hz |
| Built-in displacement sensor | Strain gauge sensor | ||
| Body Material | Aluminum + Steel | Steel | |
PFH Metal case enclosed piezo-electric element used
| Model Number | PFHMW＊＊-100U |
|---|---|
| Appearance |  |
| Nominal diameter | Large dia. |
| Travel range ( Closed loop ) | 100μm |
| Resolution | 2nm |
| Repeatability | ±2nm |
| Resonant frequency ( 0g Load ) | 370Hz |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum + Steel |
PFH Built-in displacement sensor: Capacitance type
PFH Built-in displacement sensor: Strain gauge type
PFH Metal case enclosed piezo-electric element used
Capacitance type
Strain gauge type
Metal case enclosed piezo-electric element used
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