Precise positioning stage of THK PRECISION

Piezo drivers (Standard capacity,Medium capacity,Large capacity)

Piezo drivers (Standard capacity,Medium capacity,Large capacity)

These are low-noise drivers designed to drive a piezo stage by applying a voltage. They can be each used as an external power supply in cases where the current is inadequate for an open-loop operation or with a driver contained in the controller.

Two methods for voltage output

  1. ①Manual
    The user can manually adjust the output from 0 to 150 V by turning a “BIAS ADJUSTMENT” dial on the front panel. The output voltage value can be checked on an indicator*.
    ※An indicator of PH103 is optional

  2. ②External control
    If an analog voltage (0 to 10 V) is input to the “Input” terminal on the rear panel, the input voltage will be amplified by 15 times to 0 to 150 V, and the amplified voltage will be output. Driving according to the waveform or frequency of the input voltage can be achieved.

By output currents, three types: "Standard capacity", "Medium capacity" and "Large capacity" are selectable from.

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Model number PH103 PH301 PH601
Type Standard capacity Medium capacity Large capacity
Number of connectable axis 1 Axis
Input voltage 0~10V
出力電圧 0~150V
Output current Average 40mA 1A 2A
Peak 500mA ±5A ±10A
Monitor output Fifteenth part of output voltage 1/15
Power supply

AC100~120V / AC200~240V

(Switchable),50/60Hz

AC100V ±10%,50/60Hz
Dimensions[mm] W210×D252×H96 W260×D314×H139 W320×D384×H156

By output currents, three types: "Standard capacity", "Medium capacity" and "Large capacity" are selectable from.

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※ Switchable

Behavior in the case of an open loop

If the stage is to be operated only with a piezo driver, feedback control will not be performed. Therefore, a piezoelectric characteristic such as hysteresis or creeping will occur.

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