ZAxis A general-purpose model with a strain gauge
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.
PSVL Z-axis stage
SCROLL
Model Number | PSVL60-200U-S | PSVL60-400U-S |
---|---|---|
Appearance | ||
Travel range (Closed loop) | 200μm | 400μm |
Resolution | 20nm | 50nm |
Repeatability | ±20nm | ±50nm |
Load capacity | 5N | |
Resonant frequency(0g Load) | 390Hz | 270Hz |
Built-in displacement sensor | Strain gauge sensor | |
Body Material | Aluminum + Steel |
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