Precise positioning stage of THK PRECISION

ZAxis A general-purpose model with a strain gauge

ZAxis A general-purpose model with a strain gauge

This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.

PSVL Z-axis stage

SCROLL
SCROLL
Model Number PSVL60-200U-S PSVL60-400U-S
Appearance PS1H / PS1L Linear motion X-axis stage
Travel range (Closed loop) 200μm 400μm
Resolution 20nm 50nm
Repeatability ±20nm ±50nm
Load capacity 5N
Resonant frequency(0g Load) 390Hz 270Hz
Built-in displacement sensor Strain gauge sensor
Body Material Aluminum + Steel

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