XAxis High durability model
Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.
Classification of performances with two mechanisms
The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.
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Direct-drive mechanism
- A mechanism in which a piezo-electric elements directly moves the table.
- It excels in resolution and response thanks to a short stroke.
- With high rigidity, it is capable of performing stable positioning even under a large load.
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Displacement magnification mechanism
- The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
- A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
- Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
Applications
- Semiconductor and FPD inspection
- HDD Tester
- Laser optic alignment
- Interferometer devices
- Analytical Instruments
- Nanometer positioning
PSM1H Direct-drive mechanism
| Model Number | PSM1H60-020U | PSM1H60F-020U | PSM1H70-040U | PSM1H70F-040U | PSM1H80-060U | PSM1H80F-060U |
|---|---|---|---|---|---|---|
| Appearance |  |
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| Travel range ( Closed loop ) | 20μm | 40μm | 60μm | |||
| Resolution | 1nm | 2nm | ||||
| Repeatability | ±1nm | ±2nm | ||||
| Load capacity | 10N | 30N | 10N | 30N | 10N | 50N |
| Resonant frequency ( 0g Load ) | 4300Hz | 3110Hz | 2740Hz | 1780Hz | 1600Hz | 1080Hz |
| Built-in displacement sensor | Capacitive displacement sensor | |||||
| Body Material | Aluminum | Steel | Aluminum | Steel | Aluminum | Steel |
PSM1L Displacement magnification mechanism
| Model Number | PSM1L70-100U |
|---|---|
| Appearance |  |
| Travel range ( Closed loop ) | 100μm |
| Resolution | 2nm |
| Repeatability | ±2nm |
| Load capacity | 10N |
| Resonant frequency ( 0g Load ) | 930Hz |
| Built-in displacement sensor | Capacitive displacement sensor |
| Body Material | Aluminum |
PSM1H Direct-drive mechanism
PSM1L Displacement magnification mechanism
PSM1H Direct-drive mechanism
PSM1L Displacement magnification mechanism
Metal sealed type" and "Resin coated type" piezoelectric actuator
The metal sealed type is designed to be less susceptible to the atmosphere by having a structure in which the piezoelectric element is isolated from the external air. It is more durable to the ambient temperature and humidity than the resin coated type. In addition, this type is less subject to deterioration (life shortening) even if it is applied with a constant voltage for a long time.
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