Precise positioning stage of THK PRECISION

XYAxis Standard model

XYAxis Standard model

Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.

Classification of performances with two mechanisms

The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.

  • Direct-drive mechanism

    • A mechanism in which a piezo-electric elements directly moves the table.
    • It excels in resolution and response thanks to a short stroke.
    • With high rigidity, it is capable of performing stable positioning even under a large load.
    Direct-drive mechanism
  • Displacement magnification mechanism

    • The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
    • A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
    • Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.
    Displacement magnification mechanism

Applications

  • Semiconductor and FPD inspection
  • HDD Tester
  • Laser optic alignment
  • Interferometer devices
  • Analytical Instruments
  • Nanometer positioning

PS2H / PS2L Standard linear XY-axes stage

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PS2H Direct-drive mechanism

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Model Number PS2H60-012U PS2H95-012U PS2H60-030U PS2H110-030U
Appearance XYAxis Standard model XYAxis Standard model XYAxis Standard model XYAxis Standard model
Travel range ( Closed loop ) (X, Y)12 μm (X, Y)30 μm
Resolution (X, Y)1 nm
Repeatability (X, Y)±1 nm
Load capacity 10N
Resonant frequency(0g Load) 2000 Hz 3800 Hz 1600 Hz 3400 Hz
Built-in displacement sensor Capacitive displacement sensor
Body Material Aluminum Aluminum Aluminum Aluminum

PS2L Displacement magnification mechanism

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Model Number PS2L50-050U PS2L92-050U PS2L100-080U PS2L50-100U PS2L60-250U
Appearance XYAxis Standard model XYAxis Standard model XYAxis Standard model XYAxis Standard model XYAxis Standard model
Travel range ( Closed loop ) (X,Y)50μm (X,Y)80μm (X,Y)100μm (X,Y)250μm
Resolution (X,Y)2nm (X,Y)10nm
Repeatability (X,Y)±2nm (X,Y)±10nm
Load capacity 5N 10N 10N 5N 5N
Resonant frequency(0g Load) 420Hz 1300Hz 480Hz 280Hz 120Hz
Built-in displacement sensor Capacitive displacement sensor
Body Material Aluminum + Steel Aluminum Aluminum Aluminum + Steel Aluminum

PS2H Direct-drive mechanism

PS2L Displacement magnification mechanism

PS2H Direct-drive mechanism

PS2L Displacement magnification mechanism

Comparison list of mechanism, stroke, resolution, and resonant frequency

It is recommended that the stroke be kept to the minimum required for high responsiveness and high resolution.

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